The Japan Society of Applied Physics

[C-7-1] Characteristics and Integration Challenges of FinFET-based Devices for (Sub-)22nm Technology Nodes Circuit Applications

A. Veloso1、M. J. H. Van Dal2、N. Collaert1、A. De Keersgieter1、L. Witters1、R. Rooyackers1、A. Redolfi1、S. Brus1、R. Duffy2、B. J. Pawlak2、G. Vellianitis2、B. Duriez2、T. Mérelle2、P. P. Absil1、S. Biesemans1、M. Jurczak1、T. Hoffmann1、R. J. P. Lander2 (1.IMEC(Belgium)、2.NXP-TSMC Res. Center(Belgium))

https://doi.org/10.7567/SSDM.2009.C-7-1