[D-8-2] High Current Reliability of Carbon Nanotube Via Interconnects

M. Sato¹、T. Hyakushima¹、A. Kawabata¹、T. Nozue¹、S. Sato¹、M. Nihei¹、Y. Awano¹ (1.MIRAI-Selete)

https://doi.org/10.7567/SSDM.2009.D-8-2