[D-8-2] High Current Reliability of Carbon Nanotube Via Interconnects

M. Sato¹, T. Hyakushima¹, A. Kawabata¹, T. Nozue¹, S. Sato¹, M. Nihei¹, Y. Awano¹ (1.MIRAI-Selete)

https://doi.org/10.7567/SSDM.2009.D-8-2