[D-8-5] Super-Low-k SiOCH Film (k=1.9) with High Water Resistance and High Thermal Stability Formed by Neutral-Beam-Enhanced-CVD

T. Sasaki¹, S. Yasuhara¹, T. Shimayama², K. Tajima², H. Yano², S. Kadomura², M. Yoshimaru², N. Matsunaga², S. Samukawa¹ (1.Tohoku Univ.(Japan), 2.STARC(Japan))

https://doi.org/10.7567/SSDM.2009.D-8-5