[D-9-2] Relative Density Characterization of Patterned Low-k material by VEELS

Y. Otsuka¹、Y. Shimizu¹、N. Kawasaki¹、S. Ogawa² (1.Toray Res. Center, Inc.(Japan)、2.Selete(Japan))

https://doi.org/10.7567/SSDM.2009.D-9-2