[D-9-2] Relative Density Characterization of Patterned Low-k material by VEELS

Y. Otsuka¹, Y. Shimizu¹, N. Kawasaki¹, S. Ogawa² (1.Toray Res. Center, Inc.(Japan), 2.Selete(Japan))

https://doi.org/10.7567/SSDM.2009.D-9-2