[F-2-5] Enhancing Mobility in Pentacene TFTs using the Film deposition in H₂ on Octadecyltrichlorosilane (OTS) Treated SiO₂

T. Yokoyama¹、C. B. Park¹、K. Nagashio¹、K. Kita¹、A. Toriumi¹ (1.Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2009.F-2-5