[G-8-2] Chemical and Electronic Properties of ALD-Al₂O₃/AlGaN Interfaces

Y. Hori¹, C. Mizue¹, K. Ooyama¹, M. Miczek², T. Hashizume¹ (1.Hokkaido Univ.(Japan), 2.Silesian Univ. of Tech.(Poland))

https://doi.org/10.7567/SSDM.2009.G-8-2