[G-8-4] Electrical Properties of Metal-Insulator-Semiconductor Capacitors on Freestanding GaN Substrate

E. Kim¹、N. Soejima¹、Y. Watanabe¹、M. Ishiko¹、T. Kachi¹ (1.Toyota Central R&D Labs., Inc.)

https://doi.org/10.7567/SSDM.2009.G-8-4