[G-8-7] Electrochemical Oxidation of GaN for Surface Control of GaN-based Device Structures

N. Harada¹、N. Shiozaki¹、E. Ogawa¹、T. Hashizume¹ (1.Hokkaido Univ.)

https://doi.org/10.7567/SSDM.2009.G-8-7