[G-8-7] Electrochemical Oxidation of GaN for Surface Control of GaN-based Device Structures

N. Harada¹, N. Shiozaki¹, E. Ogawa¹, T. Hashizume¹ (1.Hokkaido Univ.)

https://doi.org/10.7567/SSDM.2009.G-8-7