[H-3-2] Control of Crystal-growth of VO₂ Films Fabricated by Excimer Laser Assisted Metal Organic Deposition

M. Nishikawa¹、T. Nakajima²、T. Kumagai²、T. Okutani¹、T. Tsuchiya² (1.Yokohama National Univ.(Japan)、2.AIST(Japan))

https://doi.org/10.7567/SSDM.2009.H-3-2