[H-3-2] Control of Crystal-growth of VO₂ Films Fabricated by Excimer Laser Assisted Metal Organic Deposition

M. Nishikawa¹, T. Nakajima², T. Kumagai², T. Okutani¹, T. Tsuchiya² (1.Yokohama National Univ.(Japan), 2.AIST(Japan))

https://doi.org/10.7567/SSDM.2009.H-3-2