The Japan Society of Applied Physics

[H-4-3] Growth of (10τ3) semipolar GaN on Si substrate with a CrN interlayer by molecular beam epitaxy

K. W. Liu1, T. H. Hsueh1, S. J. Young1, H. Hung1, S. X. Chen1, Y. Z. Chen1, S. J. Chang1 (1.Nation Cheng Kung Univ.)

https://doi.org/10.7567/SSDM.2009.H-4-3