2009 International Conference on Solid State Devices and Materials

Oct 6, 2009 - Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan

[H-7-1] Technology Trends of CZ-Silicon Substrates for Power Devices

K. Kashima¹ (1.Covalent Materials Corp.)

https://doi.org/10.7567/SSDM.2009.H-7-1

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