[H-7-4] Large-scale Quantum Chemical Molecular Dynamics Study on the SiC/SiO₂ Interface for SiC-based Devices

J. P. Yacapin¹、A. Suzuki¹、H. Tsuboi¹、N. Hatakeyama¹、A. Endou¹、H. Takaba¹、M. Kubo¹、A. Miyamoto¹ (1.Tohoku Univ.)

https://doi.org/10.7567/SSDM.2009.H-7-4