[H-7-4] Large-scale Quantum Chemical Molecular Dynamics Study on the SiC/SiO₂ Interface for SiC-based Devices

J. P. Yacapin¹, A. Suzuki¹, H. Tsuboi¹, N. Hatakeyama¹, A. Endou¹, H. Takaba¹, M. Kubo¹, A. Miyamoto¹ (1.Tohoku Univ.)

https://doi.org/10.7567/SSDM.2009.H-7-4