[H-8-4] Orientation Control of Large Grain Poly-Si on Glass by Interfacial Oxide Layer Controlled Al-Induced Crystallization

M. Kurosawa¹, N. Kawabata¹, T. Sadoh¹, M. Miyao¹ (1.Kyushu Univ.)

https://doi.org/10.7567/SSDM.2009.H-8-4