[I-2-2] PL Enhancement of Si Ring Resonators by Hydrogen Plasma Treatment

Y. Wang¹, J. Cai¹, S. Lin¹, Y. Ishikawa¹, Y. Yamashita², Y. Kamiura², K. Wada¹ (1.Univ. of Tokyo(Japan), 2.Okayama Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.I-2-2