[I-2-2] PL Enhancement of Si Ring Resonators by Hydrogen Plasma Treatment

Y. Wang¹、J. Cai¹、S. Lin¹、Y. Ishikawa¹、Y. Yamashita²、Y. Kamiura²、K. Wada¹ (1.Univ. of Tokyo(Japan)、2.Okayama Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.I-2-2