[I-5-5L] Deterioration of mechanical characteristics of micro-cantilevers by plasma induced damage

M. Tomura¹、Y. Yoshida¹、T. Ono¹、C. H. Huang¹、S. Samukawa¹ (1.Tohoku Univ.)

https://doi.org/10.7567/SSDM.2009.I-5-5L