[I-9-6L] 2 x 2 Thermooptic Silicon Oxynitride Optical Switch Incorporating the Cascaded Multimode Interference Waveguides

R. W. Chuang^1,2, M. T. Hsu¹, Z. L. Liao¹ (1.National Cheng Kung Univ.(Taiwan), 2.National Nano Device Labs.(Tiawan))

https://doi.org/10.7567/SSDM.2009.I-9-6L