[I-9-6L] 2 x 2 Thermooptic Silicon Oxynitride Optical Switch Incorporating the Cascaded Multimode Interference Waveguides

R. W. Chuang^1,2、M. T. Hsu¹、Z. L. Liao¹ (1.National Cheng Kung Univ.(Taiwan)、2.National Nano Device Labs.(Tiawan))

https://doi.org/10.7567/SSDM.2009.I-9-6L