[J-1-3] AlGaN/GaN HFET using AlN/GaN Superlattice Barrier Layer

S. Yagi¹, Y. Kawakami¹, X. Q. Shen¹, A. Nakajima¹, T. Ide¹, M. Shimizu¹ (1.AIST)

https://doi.org/10.7567/SSDM.2009.J-1-3