[J-5-2] Enhancement-mode MOCVD Grown ZnO TFTs on Glass Substrates using N₂O Plasma Treatment

K. Remashan¹、Y. S. Choi¹、S. J. Park¹、J. H. Jang¹ (1.Gwangju Inst. Of Sci. and Tech.)

https://doi.org/10.7567/SSDM.2009.J-5-2