[J-6-3] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror

M. Sasaki¹, S. Kumagai¹, M. Fujishima², K. Hane², H. Miura² (1.Toyota Technological Inst.(Japan), 2.Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.J-6-3