[J-6-3] Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror

M. Sasaki¹、S. Kumagai¹、M. Fujishima²、K. Hane²、H. Miura² (1.Toyota Technological Inst.(Japan)、2.Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.J-6-3