[J-6-4] PZT Acoustic Energy Harvester Proposed for use in MEMS/IC Integrated Systems

H. Ichioka¹, S. Kimura¹, T. Sugou¹, Y. Nishioka¹ (1.Nihon Univ.)

https://doi.org/10.7567/SSDM.2009.J-6-4