[J-6-5] Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection

F. A. Hassani¹, C. Cobianu², S. Armini³, V. Petrescu⁴, P. Merken⁴, D. Tsamados⁵, A. M. Ionescu⁵, Y. Tsuchiya¹, H. Mizuta¹ (1.Univ. of Southampton(UK), 2.Honywell Romania SRL(Romania), 3.IMEC(Belgium), 4.Stichting IMEC-NL(Netherland), 5.EPFL(Switzerland))

https://doi.org/10.7567/SSDM.2009.J-6-5