[J-9-3] New Functional Device Characteristics with 2-Dimensional Array of Si Nanodisks Fabricated by Combination of Bio-Template and Ultimate Top-down Etching

M. Igarashi¹、C. H. Huang¹、M. Tomura¹、M. Takeguchi²、S. Horita³、Y. Uraoka⁴、T. Fuyuki⁴、I. Yamashita^4,5、T. Morie⁶、S. Samukawa¹ (1.Tohoku Univ.(Japan)、2.NIMS(Japan)、3.JAIST(Japan)、4.NAIST(Japan)、5.Panasonic Corp.(Japan)、6.Kyushu Inst. of Tech.(Japan))

https://doi.org/10.7567/SSDM.2009.J-9-3