[J-9-3] New Functional Device Characteristics with 2-Dimensional Array of Si Nanodisks Fabricated by Combination of Bio-Template and Ultimate Top-down Etching

M. Igarashi¹, C. H. Huang¹, M. Tomura¹, M. Takeguchi², S. Horita³, Y. Uraoka⁴, T. Fuyuki⁴, I. Yamashita^4,5, T. Morie⁶, S. Samukawa¹ (1.Tohoku Univ.(Japan), 2.NIMS(Japan), 3.JAIST(Japan), 4.NAIST(Japan), 5.Panasonic Corp.(Japan), 6.Kyushu Inst. of Tech.(Japan))

https://doi.org/10.7567/SSDM.2009.J-9-3