[J-9-4] A New Structure of Nanodisk (Stacked Nanodisk) Fabricated by Bio-nano-process and Defect-free Neutral Beam Etching

C. H. Huang¹、M. Igarashi¹、M. Tomura¹、M. Takeguchi²、S. Horita³、Y. Uraoka⁴、T. Fuyuki⁴、I. Yamashita^4,5、S. Samukawa¹ (1.Tohoku Univ.(Japan)、2.NIMS(Japan)、3.JAIST(Japan)、4.NAIST(Japan)、5.Panasonic Corp.(Japan))

https://doi.org/10.7567/SSDM.2009.J-9-4