[J-9-4] A New Structure of Nanodisk (Stacked Nanodisk) Fabricated by Bio-nano-process and Defect-free Neutral Beam Etching

C. H. Huang¹, M. Igarashi¹, M. Tomura¹, M. Takeguchi², S. Horita³, Y. Uraoka⁴, T. Fuyuki⁴, I. Yamashita^4,5, S. Samukawa¹ (1.Tohoku Univ.(Japan), 2.NIMS(Japan), 3.JAIST(Japan), 4.NAIST(Japan), 5.Panasonic Corp.(Japan))

https://doi.org/10.7567/SSDM.2009.J-9-4