[P-1-1] Formation of Pr Oxide Films by Atomic Layer Deposition using Pr(EtCp)₃ Precursor

H. Kondo¹、H. Matsui¹、K. Furuta¹、M. Sakashita¹、S. Zaima¹ (1.Nagoya Univ.)

https://doi.org/10.7567/SSDM.2009.P-1-1