[P-1-14] Properties of LaAlO Film after Waterless Process using Organic Solvent containing Anhydrous HF

M. Honjo¹、N. Komatsu¹、T. Masuzumi¹、H. Aoki¹、D. Watanabe¹、C. Kimura¹、T. Sugino¹ (1.Osaka Univ.)

https://doi.org/10.7567/SSDM.2009.P-1-14