Properties of LaAlO Film after Waterless Process using Organic Solvent containing Anhydrous HF

2009 International Conference on Solid State Devices and Materials

Oct 6, 2009 - Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan

M. Honjo¹, N. Komatsu¹, T. Masuzumi¹, H. Aoki¹, D. Watanabe¹, C. Kimura¹, T. Sugino¹ (1.Osaka Univ.)