[P-1-4] Study of La-doped GeO2 Films from Defect Annihilation Viewpoint T. Tabata1,2, K. Kita1,2, A. Toriumi1,2 (1.Univ. of Tokyo(Japan), 2.CREST-JST(Japan)) https://doi.org/10.7567/SSDM.2009.P-1-4