Fine Pattern Preparation for Various Metals by using Selective Deposition based on Photochromic Surfaces

Y. Sesumi; S. Yokojima; S. Nakamura; K. Uchida; T. Tsujioka

doi:https://doi.org/10.7567/SSDM.2009.P-10-18

[P-10-18] Fine Pattern Preparation for Various Metals by using Selective Deposition based on Photochromic Surfaces

Y. Sesumi¹, S. Yokojima², S. Nakamura², K. Uchida³, T. Tsujioka¹ (1.Osaka Kyoiku Univ.(Japan), 2.Mitsubishi Chemical Group Sci. and Tech. Res. Center Inc.(Japan), 3.Ryukoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.P-10-18

2009 International Conference on Solid State Devices and Materials

[P-10-18] Fine Pattern Preparation for Various Metals by using Selective Deposition based on Photochromic Surfaces