The Japan Society of Applied Physics

[P-10-18] Fine Pattern Preparation for Various Metals by using Selective Deposition based on Photochromic Surfaces

Y. Sesumi1、S. Yokojima2、S. Nakamura2、K. Uchida3、T. Tsujioka1 (1.Osaka Kyoiku Univ.(Japan)、2.Mitsubishi Chemical Group Sci. and Tech. Res. Center Inc.(Japan)、3.Ryukoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.P-10-18