[P-10-19] Surface Modification of Organic Thin Films by Neutral Beam Irradiation

M. Hirade^1,2、T. Kubota^2,3、Y. Tsuru^2,4、M. Yahiro^1,2,6、K. Miyazaki^2,4、S. Samukawa^2,5、C. Adachi^1,2 (1.Kyushu Univ.(Japan)、2.Beans Lab.(Japan)、3.Univ. of Tokyo(Japan)、4.Kyushu Inst. of Tech.(Japan)、5.Tohoku Univ.(Japan)、6.ISIT(Japan))

https://doi.org/10.7567/SSDM.2009.P-10-19