[P-10-20] Gas Adsorption Properties of Fluorocarbon Polymer Thin Films Prepared by Three Different Types of r.f. Magnetron Sputtering Systems

N. Hasegawa¹, S. Yano¹, S. Iwamori¹, K. Noda² (1.Kanazawa Univ.(Japan), 2.AIST(Japan))

https://doi.org/10.7567/SSDM.2009.P-10-20