[P-10-21] Adsorption Properties of Polymer Thin Films Prepared by r.f. Sputtering with a BPDA-PDA Polyimide Target

S. Yano¹, A. Uemura^1,2, S. Iwamori¹, K. Noda³ (1.Kanazawa Univ.(Japan), 2.Indus. Res. Inst. of Ishikawa(Japan), 3.AIST(Japan))

https://doi.org/10.7567/SSDM.2009.P-10-21