[P-10-21] Adsorption Properties of Polymer Thin Films Prepared by r.f. Sputtering with a BPDA-PDA Polyimide Target

S. Yano¹、A. Uemura^1,2、S. Iwamori¹、K. Noda³ (1.Kanazawa Univ.(Japan)、2.Indus. Res. Inst. of Ishikawa(Japan)、3.AIST(Japan))

https://doi.org/10.7567/SSDM.2009.P-10-21