[P-11-6] Ultra-Conformal Metal Coating on High-aspect-ratio 3D Structures using Supercritical Fluid: Controlled Selectivity/Non-Selectivity

T. Momose^1,2、T. Uejima¹、H. Yamada²、M. Sugiyama^1,2、Y. Shimogaki^1,2 (1.Univ. of Tokyo(Japan)、2.BEANS Project, METI(Japan))

https://doi.org/10.7567/SSDM.2009.P-11-6