[P-11-6] Ultra-Conformal Metal Coating on High-aspect-ratio 3D Structures using Supercritical Fluid: Controlled Selectivity/Non-Selectivity

T. Momose^1,2, T. Uejima¹, H. Yamada², M. Sugiyama^1,2, Y. Shimogaki^1,2 (1.Univ. of Tokyo(Japan), 2.BEANS Project, METI(Japan))

https://doi.org/10.7567/SSDM.2009.P-11-6