2009 International Conference on Solid State Devices and Materials

Oct 6, 2009 - Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan

[P-11-7] Fabrication of Electrostatic Actuated Rotary for Micro Interferometer

Y. M. Lee¹, M. Toda¹, T. Ono¹, M. Esashi¹ (1.Tohoku Univ.)

https://doi.org/10.7567/SSDM.2009.P-11-7

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