[P-14-3] Cathodoluminescence Microcharacterization of Recombination Centers in Lifetime-Controlled IGBTs

R. Sugie¹、T. Mitani¹、M. Yoshikawa¹、Y. Iwata²、R. Satoh² (1.Toray Res. Center Inc.(Japan)、2.Osaka Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.P-14-3