[P-14-9] High Performance Transparent Conducting Ga-doped ZnO film Deposited by RF-magnetron Sputter Deposition Technique

J. K. Kim^1,2、J. M. Lee^1,2、J. W. Lim^1,2、J. H. Kim²、S. J. Yun^1,2 (1.Univ. of Sci. and Tech.(Korea)、2.Electronics and Telecommunications Res. Inst.(Korea))

https://doi.org/10.7567/SSDM.2009.P-14-9