The Japan Society of Applied Physics

[P-2-8] Raman Spectroscopic Metrology for Stress measurement in Semiconductor Device Development and Process

N. Naka1、S. Kashiwagi1、K. Ohtsuki1、J. H. Kim2、C. H. Lee2、S. T. Ahn2、K. H. Bae2、H. W. Yoo2、C. H. Kim2 (1.HORIBA, Ltd.(Japan)、2.Hynix Semiconductor Inc.(Korea))

https://doi.org/10.7567/SSDM.2009.P-2-8