[P-3-8] Design and Fabrication of Low-actuation Voltage and Low-Insertion Loss RF Switch by CMOS-MEMS and EN/IG Processes

J. T. Huang¹、P. C. Lin¹、F. H. Yeh¹、Y. K. Hsu¹、K. Y. Lee¹ (1.National Taipei Univ of Tech.)

https://doi.org/10.7567/SSDM.2009.P-3-8